高真空自動化熱蒸鍍機 High Vacuum Thermal Evaporator
聯絡方式 Contact
儀器管理者 Instrument administrator
澹台富國博士 Dr.Fu Gow Tarntair
EMAIL: tarntair@nycu.edu.tw
對外開放服務時間 Opening hours
週一~週日 00:00~晚上24:00
00:00~24:00 from Monday to Sunday.
使用功能說明 Applications
1. 金屬蒸鍍(Metal evaporation)： Au, AuGe, AuBe, Ti, Cr
2. 如欲蒸鍍其他材料，請先行與設備管理人討論 If you need to coat materials excluded that we listed above, please contact with the administrator.
3. 每個run (不破真空) 至多可度3種金屬 (The Max. materials in one run are 3 kinds)
規格 Specifications
1.真空抽氣裝置 (vacuum system):
前級機械幫浦 mechanical pump (抽氣率 pump ratio : 800 L/min (@ 50Hz))，
後級渦輪分子真空幫浦 turbo pump (抽氣率：≧ 800 L/s, 終極壓力 : ≦ 10-9 Pa order)
2. 晶片旋轉基座(substrate carrier):
可承接6″樣品 6″*3片 (Max. capacity: 6”x 3 piece)
旋轉速度(substrate rotation speed): 5 ~ 30 rpm 速度可調 (speed can be tunable)
3. 基板可加熱 (substrate heating function) :
110 V 500W x 2 石英鹵素加熱燈管 (Quartz halogen heating tube)
Max Temperature : 250℃
4. 膜厚顯示器 (Inficon SQM160)
Thickness Resolution: +/- 0.37 A。
Rate Resolution: +/- 0.37 A。
收費標準 Fee
| 委託操作費用 Commissioning fee | 自行操作會員收費 independent-operation fee | 自行操作訓練費Training fee | |
| 學術單位Academic institute | NT$2000元/hr | NT$20000/20hrs All consumption need to be prepared by users. |
NT$2000元/hr All consumption need to be prepared by users. |
| 業界Corporation | NT$4000元/hr | NT$40000/20hrs All consumption need to be prepared by users. |
NT$4000元/hr All consumption need to be prepared by users. |
For commissioning case, extra fee for metal is necessary:
Au (<100nm) 時價 (current preice)
AuGe (<100nm) Academic institute: NT$3500 Corporation: NT$5000
AuBe (<100nm) Academic institute: NT$3500 Corporation: NT$5000
Cr (<100nm) Academic institute: NT$1000 Corporation: NT$1000
若由各單位合格操作者自行訓練，其訓練使用時數由各單位之自行操作會員時數扣除費用
若委託本中心代為訓練，費用為表格中自行操作訓練費
If training is conducted by a qualified operator, the charge for the training period will be deducted from the membership account of the institute. If the training is conducted by the administrator, the charge is referred to the table.
管理及服務辦法 User regulations
1.本機台為B級機台，提供委託及自行操作服務。
The system is classified as a Grade B instrument, and operation can be carried out by the individual making the reservation or by qualified personnel.
2.申請委託操作者須事先與儀器管理員連絡並進行實驗討論評估，確認樣品及製程可使用本機台，並由管理員估價計算費用後，經指導教授或主管同意後，方可提出使用申請。
Those applying for commissioned operation should discuss and evaluate the experiment with the instrument administrator in advance, ensuring that the sample and fabrication process are suited for the instrument. The application can be filed after the cost is estimated by the administrator and approved by either the advisor or the supervisor.
3.委託操作使用者採序號預約，確認可提出使用申請者請先至本中心網站下載『實驗申請單』，詳填資訊後，e-mail至cnst-adm@cc.nctu.edu.tw並以電話或E-mail與儀器負責人洽詢使用時段及確認實驗條件與試片製備。委託申請人需在現場共同進行實驗。
Each case of commissioned operation is by reservation only. Applicants who have been evaluated and approved can down the “ application form” from our website, and email the completed form to cnst-adm@cc.nctu.edu.tw. The applicants are required to contact the instrument supervisor via phone or email regarding the available time slot, sample preparation and fabrication. The applicants have to be present for the duration of the experiment.
4.申請自行操作者，可於與儀器管理員連絡並進行實驗討論評估，確認樣品及製程可使用本機台，經指導教授或主管同意後，始可申請加入本中心會員並提出自行操作訓練考核申請，其訓練考核程序請參照『自行操作訓練與考核辦法』，通過考核後始可自行操作。
The applicant who is willing to operate the instrument by himself should discuss the details of his experiment, such as sample confirmation and fabrication, with the administrator first. After obtaining permission from the supervisor, the applicant can apply for membership of the center as well as evaluation of operation and training. For details about evaluation procedures, please refer to “Guideline for independent operation and evaluation.” Those who pass the evaluation can operate the instrument independently.
5.自行操作者採取網路預約。通過機台考核之合格使用者始可取得網路預約之帳號。加入會員及申請訓練者請先至本中心網站下載『實驗申請單』，詳填資訊後，e-mail至cnst-adm@cc.nctu.edu.tw並以電話或E-mail與儀器負責人洽詢訓練考核相關事宜。
The qualified users can make reservations online. After passing the practical evaluation, users can obtain an account number for online reservation purpose. Those who wish to apply for membership and training, please download the “ application form” from our website. Email the completed form to cnst-adm@cc.nctu.edu.tw. Users should contact the instrument supervisor via phone or email for details regarding training and evaluation.
6.使用者須遵守實驗室所有相關規定。違反實驗室規定者依本中心實驗室管理規則辦理。
Users must abide by the regulations of the laboratory. Those in violation of lab regulations are subject to punishments accordingly.
7.。如有任何疑問，歡迎來電洽詢儀器負責人員。
Please feel free to contact the administrator for any further inquiries.
8.機台使用費用規定請參照『收費標準』。
Please refer to “Fee” for details of fees for using the instrument.
自行操作訓練與考核辦法 Guideline for independent operation and evaluation
1.本系統自行操作各單位（以指導教授、計畫主持人或公司行號為單位）開放三個名額，每位申請者須同時提出其研究使用計畫及材料特性予本中心，由本中心評估並決定是否可接受其申請。
The applicants who want to operate by themselves need to submit the details of their experiment and sample material for application of membership and the training program. The account of membership is registered under your supervisor, PI, or company name.
2.申請者上網下載並填寫『實驗申請單』詳填使用者與試片資訊後，e-mail至cnst-adm@cc.nctu.edu.tw，本中心將儘速回覆您的使用申請。
Applicants should download the “ application form” online and email the completed form, including details about the user and lamella, to cnst-adm@cc.nctu.edu.tw. We will respond to your application as soon as possible.
3.考核通過後，可於週一至週五8:00~17:00自行操作。全程自行操作累積使用時數達20小時以上，並未有任何違反機台規定與任何損及行為者，可申請全開放時段之使用權限。
Once the users pass the evaluation, they can operate the instrument independently from Monday to Friday between 8:00 AM and 5:00 PM. Those accumulating 20 hours of independent operation without violating any regulation or causing any damage may apply for unrestricted access permission.
4.合格使用者皆有訓練新訓人員之義務。
All qualified users are obligated to train new personnel.
5.各實驗室可自行訓練新訓人員。
Training of new personnel can be conducted voluntarily by members of each lab.
6.考核通過者若連續 6 個月無操作紀錄，取消其自行操作資格。日後若需自行操作，需另行申請、訓練、考核。
Qualified users without any record of operation for 6 months will be disqualified from independent operation. They will be required to repeat the process of application, training, and evaluation again, should they need to operate independently.
7.本中心將於實驗完畢後依據使用時間斟酌自儲值費用中扣取實驗費用。
The charge for the operation will be deducted from the pre-paid account of your membership upon completion of experiment.
樣品規範 Sample specifications
1.基板限制 (substrate requirement):
a. 種類(kind) : (矽基板、金屬基板、玻璃基板皆可) (Si、metal、glass are acceptable)
b. 樣品大小(sample size) : 6 吋可3片( Max. are 3 pieces for 6’)
可破片(數量不受限，只要6吋載片可容納就可)
broken wafers are acceptable, the quantity of broken sample is not limited if they can put on the 6’ carrier
2.使儀器提供給必要研究者使用，避免儀器資源的浪費，建議與機台管理者詳細討論後，再決定是否進入機台觀察，以充分發揮本儀器之功能。
Use of instruments should be prioritized for researchers requiring the instruments. To avoid any possible waste of resources, users must discuss with the administrator before deciding whether observation is necessary. Usage of the machine should be optimized.
3.存取資料請自備空白光碟片。為避免設備中毒，禁用隨身碟進行資料傳輸。
Users are advised to prepare CDs for data storage. The use of flash drive is forbidden to prevent any possibility of virus infection.
4.自行操作人員，若擅自放入上述有害的試樣於本儀器者，將被吊銷操作資格。
If the qualified user is found loading any harmful sample with above-mentioned description, the user will be disqualified from operating the instrument.
5.委託操作者上機前，技術員會再次要求確認您的樣品種類，請誠實申報。若發現申報不實，本中心將取消您的使用資格。
In cases of commissioned operation, the administrator will verify the description of the sample with you. If sample description is found to be false, you will be disqualified from using the instrument.
6.若因違反規定造成儀器污染或損壞時，所隸屬單位及其指導教授須負責賠償，賠償費用由原廠評估，再由本中心開會決議後執行並暫停儀器之使用權。
If violation of regulation results in contamination or damage of the instrument, the institute and the advisor will bear the cost of compensation, which will be estimated by the manufacturer. We may disqualify the user from using the instrument.
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