最新消息 Hot News
由於FIB Ga source 有問題導致 I-GUN高壓漏電, 需重新更換Ga Source, FIB 暫時停用!
Due to the problem of FIB Ga Source, there is the current leakage of the suppressor unit of FIB I-Gun. FIB is not available before the Ga source is replaced.
高真空共濺鍍系統 High Vacuum Co-sputtering System
聯絡方式 Contact
儀器管理者 Instrument administrator
黃博士Dr. P.-R. Huang
EMAIL: ping2021@nycu.edu.tw
對外開放服務時間 Opening hours
本系統服務以4小時為 1 單位，可預約時段為：
週日~週六 09:00 ~ 17:00 (一般使用者), 17:00~ 24:00 (僅開放給24小時使用者)
Reservations are made in 4-hour increments.
08:00~17:00 from Sunday to Saturday are available for general users; 17:00 ~ 24:00 are available only for 24-hr users.
使用功能說明 Applications
1. 濺鍍沉積 半導體(Si, Boron) ,Deposition of semiconductor (including Si)
2. 濺鍍沉積 介電質(包含但不限各類Si之氧化物、氮化物與碳化物) ,Deposition of dielectric (including SiO2, Si3N4, SiC etc.)
3. 濺鍍沉積 各種金屬氧化物 ,Deposition of metal oxides (including ZnO, AZO, ITO, and ITO etc.) materials
規格 Specifications
1.靶材與晶圓乘載量：
(a) 靶材尺寸：3吋
targets size: 3-inch
(b) 基板：3吋以下之矽、石英、玻璃破片，不可含金屬
Substrate: Si, glass, quartz or sapphire pieces within 3-inch, excluding metal
(d) 可升溫製程，溫度範圍為室溫 ~ 300°C
Substrate temperature: RT ~300°C
(e) 製程氣體：Ar, N2, O2, forming gas (Ar:O2= 95:5)
Working gas: Ar, N2, O2 and forming gas (Ar:O2=95:5)
2、抽氣效率(Pumping Performance)：
Ultimate Pressure: < 5.0 x 10-7 Torr
3、鍍膜均勻性(Deposition Performance)：
(1) Film thickness uniformity on the substrate: < 5%
(2) Film thickness uniformity within the batch: < 5%
收費標準 Fee
1.委託操作費用 (Commissioning fee)
學術單位 (Academic institute) NT$5000 + 1000/hr
業界 ( Corporation) NT$7500 + 2000/hr
*每次為4片25 mm* 25 mm 之破片或3吋全片。
*4 pieces within 25*25 mm2 or one 3-inch full wafer in one deposition
*靶材須自備
2.自行操作會員收費 (independent-operation fee)
學術單位 (Academic institute) NT$10000/20 hours
業界 ( Corporation) 不開放(not available)
3.自行操作訓練 (Training fee)
若由各單位合格操作者自行訓練，其訓練使用時數由各單位之會員時數扣除費用
若委託本中心代為訓練，費用為：
If training is conducted by a qualified operator, the charge for the training period will be deducted from the membership account of the institute. If the training is conducted by the administrator, the charge is as follows:
學術單位 (Academic institute) NT$2000/2hr-person
業界 ( Corporation) 不開放(not available)
管理及服務辦法 User regulations
1.本機台為B級機台，提供委託及自行操作服務。
The system is classified as a Grade B instrument, and operation can be carried out by the individual making the reservation or by qualified personnel.
2. 申請委託操作者須事先與儀器管理員連絡並進行實驗討論評估，確認試片規格是否合乎規範，並由管理員估價計算費用後，經指導教授或主管同意後，方可提出申請。
Those applying for commissioned operation should discuss and evaluate the experiment with the instrument administrator in advance, ensuring that the samples are suited for the instrument. The application can be filed after the cost is estimated by the administrator and approved by either the advisor or the supervisor.
3. 委託操作申請者請先至本中心網站下載『Sputter實驗申請單』，詳填資訊後，e-mail至cnst-adm@cc.nctu.edu.tw並以E-mail向儀器負責人洽詢使用時段及確認實驗條件與試片製備。委託申請人需在現場共同進行實驗。
Each case of commissioned operation is by reservation only. Applicants who have been evaluated and approved can down the “Sputter application form” from our website, and email the completed form to cnst-adm@cc.nctu.edu.tw. The applicants are required to contact the instrument supervisor via phone or email regarding the available time slot, sample preparation and fabrication. The applicants have to be present for the duration of the experiment.
4. 申請自行操作者，可於與儀器負責人連絡並進行實驗討論評估，確認試片規格是否合乎規範，經指導教授或主管同意後，始可申請加入本中心會員並提出自行操作訓練考核申請，其訓練考核程序請參照『自行操作訓練與考核辦法』，通過考核後始可自行操作。
The applicant who is willing to operate the instrument by himself should discuss the details of his experiment, such as sample confirmation and fabrication, with the administrator first. After obtaining permission from the supervisor, the applicant can apply for membership of the center as well as evaluation of operation and training. For details about evaluation procedures, please refer to “VI. Guideline for independent operation and evaluation.” Those who pass the evaluation can operate the instrument independently.
5. 自行操作者採取網路預約。通過機台考核之合格使用者始可取得網路預約之帳號。加入會員及申請訓練者請先至本中心網站下載『Sputter實驗申請單』，詳填資訊後，e-mail至cnst-adm@cc.nctu.edu.tw並以E-mail與儀器負責人洽詢訓練考核相關事宜。
The qualified users can make reservations online. After passing the practical evaluation, users can obtain an account number for online reservation purpose. Those who wish to apply for membership and training, please download the “Sputter application form” from our website. Email the completed form to cnst-adm@cc.nctu.edu.tw. Users should contact the instrument supervisor via email for details regarding training and evaluation.
6. 使用者須遵守實驗室所有相關規定。違反實驗室規定者依本中心實驗室管理規則辦理。
Users must abide by the regulations of the laboratory. Those in violation of lab regulations are subject to punishments accordingly.
7.。如有任何疑問，歡迎來信洽詢儀器負責人員。
Please feel free to contact the instrument supervisor for any further inquiries.
8. 機台使用費用規定請參照『收費標準』。
Please refer to “Fee” for details of fees for using the instrument.
自行操作訓練與考核辦法 Guideline for independent operation and evaluation
自行操作訓練與考核辦法 Guideline for independent operation and evaluation
1.申請者自行下載『Sputter實驗申請單』，完成申請及繳費程序後自行與儀器聯絡人接洽訓練事宜。
Applicants should download the “Sputter application form” online and email the completed form, including details about the user and lamella, to instrument supervisor. We will respond to your application as soon as possible. The applicant can contact the instrument supervisor for the booking of training.
2. 本機台訓練時數須達10小時以上，方可提出機台考核申請。考核通過後，可於週一至週五9:00~17:00自行操作。全程自行操作累積使用時數達20小時以上且同日內最多累積4小時，並未有任何違反機台規定與任何損及行為者，可申請全開放時段之使用權限。
Those who have accumulated more than 10 hours of training may apply to the instrument supervisor for assessment. Once the users pass the evaluation, they can operate the instrument independently from Monday to Friday between 9:00 AM and 5:00 PM. Those accumulating 20 hours of independent operation without violating any regulation or causing any damage may apply for unrestricted access permission.
3. 合格使用者皆有訓練新訓人員之義務。
All qualified users are obligated to train new personnel.
4. 各實驗室可自行訓練新訓人員。
Training of new personnel can be conducted voluntarily by members of each lab.
5. 考核通過者若連續 6 個月無操作紀錄，取消其自行操作資格。日後若需自行操作，需另行申請、訓練、考核。
Qualified users without any record of operation for 6 months will be disqualified from independent operation. They will be required to repeat the process of application, training, and evaluation again, should they need to operate independently.
6. 本中心將於實驗完畢後依據使用時間斟酌自儲值費用中扣取實驗費用。
The charge for the operation will be deducted from the pre-paid account of your membership upon completion of experiment.
樣品規範 Sample specifications
1.不接受粉末材料。
Powder materials are not accepted.
2.樣品的尺寸直徑(Diameter) < 3 inch
3.若樣品含金屬，須以光阻或其他材料完整覆蓋，不接受金屬裸露。
Metal material on samples must be fully covered by other materials (e.g. photoresist, SiO2, Si3N4 …)
4. 若因個人操作不當造成儀器損壞，本中心可視情況要求操作者所屬實驗室主管做合理的賠償，唯匿情不報者除要求賠償外，並撤銷其單位往後的使用資格。
If the instrument is damaged due to improper personal operation, CNST may require the operator’s adviser to make reasonable compensation. If you damage the instrument and do not report this, they not only shall make compensation but also be ceased to use in the future.
5 .實驗完成後，請將儀器抽真空回復待機狀態。未執行者，自實驗完成時間算起到發現的時間為止，以此時段的1/3扣除該會員的使用時數，並將該學生停權2週。
After fabrication, please pump down the chamber and recover the sputter to the idle state. If not, the time from the completion of the experiment is counted up until the time of discovery. In that period, one-third of the time is deducted from the quota of the member, and the student is suspended for two weeks.
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