1.申請前須知(Notice before any application)
本機台為B級機台，提供委託及自行操作服務，自行操作僅限加入會員之單位，且須事前有儲值固定單位金額以供後續自行操作收費。
The system is classified as a Grade B instrument with two available ways for having process on this system.
(a) People with qualified license are allowed
(b) Process can be done by the help of the administrator through commissioned application.
Option (a) is only available for people in the organizations belong to the membership of the center. And the organization has to deposit certain amount of money for each system for the cost of every independent operation.
申請委託操作者須事先與儀器管理員連絡並進行實驗討論評估，確認樣品及製程可使用本機台，並由管理員估價計算費用後，經指導教授或主管同意後，方可提出使用申請。
Those applying for commissioned operation should discuss and evaluate the experiment with the instrument administrator in advance, ensuring that the sample and fabrication process are suited for the instrument. The application can be filed after the cost is estimated by the administrator and approved by either the advisor or the supervisor.』

2. 預約與自行操作須知 (Booking and Independent Operation)
請自行上網預約直接安排時段。
Please go to the booking system online to select slots.
此項儀器開放通過考核者於上班及非上班時段自行操作，凡使用者應自行詳細確實的填寫儀器使用紀錄簿，並註明所發生的任何異常狀況，違者停止使用資格 3 個月。
Every user has to record the process that have been done and any abnormal situations happened during the process on the user-record book. The eligibility of using the machine will be banned for three months if any user does not follow the rule.
若因個人操作不當造成儀器損壞，本中心可視情況要求操作者所屬實驗室主管做合理的賠償，唯匿情不報者除要求賠償外，並撤銷其單位往後的使用資格。
If the system is broken due to personal improper operation, CNT would require the reasonable compensation from the laboratory to which the user is belonged. In addition, if the user is found to hide the fact of his/her improper operation, all the people from same laboratory will no longer have the right to use the machine.

3. 申請委託服務之方法 (Application for commissioned application)
自行下載『 ICP/RIE 一般使用者儀器使用、訓練、委託操作申請表暨經費轉帳核准單 』，完成申請程序後自行與儀器聯絡人接洽委託操作事宜。
務必詳實填寫樣品結構、實驗材料及蝕刻深度等實驗需求。
Please go to the website and download the “PECVD application form” online and email the completed form, including details about the user and lamella, to lcli@faculty.nctu.edu.tw. We will respond to your application and the required fee as soon as possible.
申請人於預約時段前 1 天 將試片送交儀器聯絡人，申請人委託前請與儀器聯絡人洽談細節，每星期送件上限4小時。
Applicants need to give samples at least one day before the experimental date. Please check the detail with the administrator to avoid any misunderstandings.
儀器聯絡人得視需要可要求申請人在現場共同進行實驗。
Applicants may be required to come with the administrator for the experiment depending on the content of application requirement.