電子束微影系統 E-beam Lithography System

聯絡方式 Contact

儀器管理者 Instrument administrator

王圣瑩小姐Miss Sheng Ying Wang TEL: 03-5712121 ext 55640

EMAIL: sy1028@nycu.edu.tw

對外開放服務時間 Opening hours

週一~週日上午8:00~下午5:00 開放白天權限使用者。下午5:00過後只開放有夜間權限使用者。
Monday~Sunday: 8:00am to 5:00pm for users with day-time license. Only users with night license is available after 5:00pm.

使用功能說明 Applications

1. 利用電子束把設計電路圖檔轉印出圖形在試片基板上。

規格 Specifications

1.Electron beam diameter: 2nm(min)

2.Line width: 10nm(min) (50kV)

3.Stitching accuracy: 30nm

4.Overlay accuracy: 30nm

5.Scanning field: 2,400μm x 2,400μm(at 20kV)、1,200μm x 1,200μm、600μm x 600μm、300μm x 300μm、150μm x 150μm、75μm x 75μm

6.Beam positioning resolution: 0.31nm

7.Pattern elements: Vertical, Horizontal, Oblique lines、Rectangle、Triangle、Quadrilateral、Disk、Circle, Cirumference, Arc(option)

收費標準 Fee

1.委託操作費用 (Commissioning fee )
學術單位 (Academic institute) NT$2400 / hr
業界 ( Corporation)不開放
2.自行操作會員收費 (independent-operation fee)
學術單位 (Academic institute) NT$1200 / hr

大量儲值會員:120000/110hr

大量儲值會員:216000/220hr

業界 ( Corporation)不開放
3. 自行操作訓練 (Training fee)
若由各單位合格操作者自行訓練，其訓練使用時數由各單位之會員時數扣除費用
若委託本中心代為訓練，費用為：
學術單位 (Academic institute) NT$2400 / hr

業界 ( Corporation)不開放

管理及服務辦法 User regulations

1.接受委托代工.
We accept commissioned OEM.

2.E-Beam若要對準前層圖形，請事先告知並製作 Alignment Mark.
If you need to align EBL pattern with former layer, please inform us and make Alignment Mark

3.本設備經考核可開放自行操作。
This equipment can be opened to Independent-operation after being qualified

4.預約後欲取消須24小時之前告知，違者停止預約資格一個月。
To cancel the reservation should be informed 24 hours before, and offenders eligible to stop the appointment a month.

5.一年內累積爽約 3 次，停止預約資格六個月
When accumulated about 3 times in one year, stop booking qualification for 6 months

6.會員制度
Membership policy
6-1 本設備適用奈米科技中心之會員制度
This equipment is applicable to the membership policy of CNST
6-2 會員制度適用於台灣聯合大學系統專任教師
The membership policy is applicable to full-time teachers of University System of Taiwan
6-3 欲申請會員資格者請自行下載『設備使用申請表_電子束微影系統』並完成繳費
If you want to apply for membership, please download 『CNST Experiment application form』of ELS-7500EX and finish payment.

7.預約自行操作之方法
Appointment for Independent-operation
7-1會員直接上網預約。
Members should make online reservations.
7-2 此項儀器開放通過考核者於上班及非上班時段自行操作，凡使用者應自行詳細確實的填寫儀器使用紀錄簿，並註明所發生的任何異常狀況，違者停止使用資格 6 個月。
This instrument is open to Independent-operation after qualification during work hours and non-working hours. All users should fill out the instrument usage record in a detailed manner, and indicate any abnormal conditions. The offender shall cease to use instrument for 6 months.
7-3 若因個人操作不當造成儀器損壞，本中心可視情況要求操作者所屬實驗室主管做合理的賠償，唯匿情不報者除要求賠償外，並撤銷其單位往後的使用資格。
If the instrument is damaged due to improper personal operation, CNST may require the operator’s adviser to make reasonable compensation. If you damage the instrument and do not report this, they not only shall make compensation but also be ceased to use in the future.

8.申請委託服務之方法
Appointment for commission-operation
8-1 自行下載『設備使用申請表_電子束微影系統』，填妥後以 E-mail 提出申請。
Fill 『CNST Experiment application form』of ELS-7500EX and email to cnst-adm@cc.nctu.edu.tw
8-2 本中心將與申請者聯絡，詢問詳細實驗規格以決定是否接受委託件。
CNST will review the spec of the experiment and check if we will receive commission or not.
8-3 申請人於預約時段前 2 天將試片及 Auto CAD 檔案送交儀器聯絡人。
The applicant should send the test substrates and Auto CAD files to the instrument administrator 2 days before the scheduled time.
8-4 儀器聯絡人得視需要可要求申請人在現場共同進行實驗。
The instrument administrator may request the applicant to conduct experiments together if needed.

9.非E-Beam 相關製程請勿使用本儀器及實驗室內耗材.
Do not use equipment and lab supplies for non-E-Beam related processes.

10.如有任何疑問，歡迎來電洽詢儀器負責人員。
Please feel free to contact the administrator for any further inquiries.

自行操作訓練與考核辦法 Guideline for independent operation and evaluation

1.E-Beam自行操作訓練之申請方法
E-Beam application method for Independent-operated training
1-1 每位指導教授開放一位學生受訓名額。
The training quota is one student for one adviser.
1-2 一般申請人需自行下載『設備使用申請表_電子束微影系統』，完成申請程序後自行與儀器聯絡人接洽訓練事宜。
If you want to apply for training, please download『CNST Experiment application form』of ELS-7500EX and finish all application process, then contact instrument administrator for training details.
1-3 累積訓練次數達10次以上者方可向儀器聯絡人申請考核。
Those who have accumulated more than 10 times of training may apply to the instrument administrator for assessment.
1-4 考核通過者，可於上班時段自行操作。
If you pass the qualification, you can operate the instrument during work hours.
1-5 考核通過者若連續 6 個月無自行操作紀錄，請先洽詢儀器聯絡人再視情況開放自行操作。
If the user has no record of Independent-operation for 6 consecutive months, please contact instrument administrator first and check if it is possible to open access for Independent-operation.

樣品規範 Sample specifications

1.使儀器提供給必要研究者使用，避免儀器資源的浪費，建議與機台管理者詳細討論後，再決定是否進入機台觀察，以充分發揮本儀器之功能。
Use of instruments should be prioritized for researchers requiring the instruments. To avoid any possible waste of resources, users must discuss with the administrator before deciding whether observation is necessary. Usage of the machine should be optimized.

2.E-Beam write Substrate以導電為主，如 S i、 GaA s、 In P、 GaN 等，(請先告知)不接受磁性材料。請勿放入揮發性物質，若儀器真空度不夠，安全閥將啟動，電子槍的隔離閥將無法開啟。
The substrates for E-Beam writing should be conductive, such as Si, GaAs, InP, GaN, we don’t accept magnetic material. DO NOT load the sample that gives a lot of outgas off, e.g. poly-dimethylsiloxane (PDMS), into the chamber. If the tool detects poor vacuum, the safety interlock will work, and the isolation valve for e-beam column will not be opened.。

3.樣品的尺寸：試片較理想容易操作大小為直徑5 cm內

Ideal sample size is within 2.5cm X 2.5cm, or within 2.5cm in diameter

4.存取資料請自備空白光碟片。為避免設備中毒，禁用隨身碟進行圖檔傳輸。
Users are advised to prepare CDs for data storage. The use of flash drive is forbidden to prevent any possibility of virus infection.

5.若因違反規定造成儀器污染或損壞時，所隸屬單位及其指導教授須負責賠償，賠償費用由原廠評估，再由本中心開會決議後執行並暫停儀器之使用權。
If violation of regulation results in contamination or damage of the instrument, the institute and the advisor will bear the cost of compensation, which will be estimated by the manufacturer. We may disqualify the user from using the instrument.