雙束聚焦離子束掃描式電子顯微鏡 Dual-Beam Focus Ion Beam Microscope

聯絡方式 Contact

儀器管理者 Instrument administrator

李良箴博士Dr. L. C. Li

TEL: 03-5712121 ext 55634

EMAIL: lcli@nycu.edu.tw

對外開放服務時間 Opening hours

週一~週日上午9:00~晚上24:00 每日為四個開放使用單位時段。
9:00~24:00 from Monday to Sunday; Four time slots (three hours each) are available per day.

儀器放置位置 (Position) : R103

使用功能說明 Applications

1. TEM試片備製 (TEM Lamella)

2. Backside polishing TEM lamella

3. 金屬沉積 (Metal deposition)

4. 奈米圖像製作 (Nano-patterning)

5. Atom Probe Specimen

上一張

下一張

規格 Specifications

1.Chamber:
a) Internal space: 254 mm in diameter and 310 mm in depth.
b) Door: 254 mm x 254 mm.
c) Specimen stage: fully motorized, movements with 130 mm x 130 mm x 100 mm in X, Y and Z axes,
360-degree continuous rotation, tilt angle from -30 degree to 90 degree and maximum specimen height
110 mm.
2. Field-emission scanning electron microscope:
a) Detectors: SE with YAG crystal, Retractable BSE with YAG crystal, In-beam SE and In-beam BSE.
b) Resolution:
SE: 1.2 nm at 30 kV; 1.5 nm at 15 kV.
In-Beam SE: 1.0 nm at 30 kV; 1.2 nm at 15 kV.
In-Beam BSE: 2 nm at 15 kV.
c) Magnification: from 1x to 1Mx or more.
d) Accelerating voltage: ranging from 200 V to 30 kV.
e) Probe current: ranging from 2 pA to 200 nA.
3. Focus ion beam microscope.
a) Ion gun: Ga liquid metal source.
b) Resolution: 2.5 nm at 30 kV at SEM-FIB coincidence point.
c) Magnification: ranging from 150x to 1Mx at 10 kV and SEM-FIB coincidence point.
d) Accelerating voltage: ranging from 0.5 kV to 30 kV.
e) Probe current: ranging from 1 pA to 50 nA.
4. Gas injection system
a) 5 individual precursor reservoirs with capillaries and injection nozzle.
b) 3-axis micro-stage with automatic nozzles positioning and touch alarm.
c) Automated temperature control.
d) gases include Pt, W, C, SiO2, H2O
5. Nanomanipulator:
a) Travelling distance: no less than 18 mm in xyz axes.
b) Omni-directional repeatability: less than 150 nm

收費標準 Fee

1.委託操作費用 (Commissioning fee )
學術單位 (Academic institute) NT$3400 / hr
業界 ( Corporation) NT$6800/ hr
金屬沉積 (Metal deposition) SiO2, W, C, H2O, Pt NT$100 / min
2. 自行操作會員收費 (independent-operation fee)
學術單位 (Academic institute) NT$57000 / 30 hours (~NT$1900/hr, 金屬超過12 min加收1小時 If metal deposition time is over 12 min, an additional hourly cost will be charged. )
Metal depositiong使用者,金屬超過12 min後, 按使用量以每小時2100元計算
For users who use metal deposition only, the cost of metal is charged NT$2100/hr in addition while the consumption of metal is over 12 minutes.
業界 ( Corporation) NT$114000 / 30 hours (~3800/hr, 金屬超過12min加收1小時 If metal deposition time is over 12 min, an additional hourly cost will be charged.)
Metal depositiong使用者,金屬超過12 min後, 按使用量以每小時3500元計算
For users who use metal deposition only, the cost of metal is charged NT$3500/hr in addition while the consumption of metal is over 12 minutes.
3. 自行操作訓練 (Training fee)
若由各單位合格操作者自行訓練，其訓練使用時數由各單位之會員時數扣除費用
若委託本中心代為訓練，費用為：
If training is conducted by a qualified operator, the charge for the training period will be deducted from the membership account of the institute. If the training is conducted by the administrator, the charge is as follows:
學術單位 (Academic institute) NT$50400 / 25 hours (2100/hr)
業界 ( Corporation) NT$100800 / 24 hours (4200/hr)
4. Low kV SEM委託操作費用 (Low kV SEM Commissioning fee)
學術單位 (Academic institute) NT$1200 / hr
Special Discount: NT$10000 /10 hr

管理及服務辦法 User regulations

1.本機台為B級機台，提供委託及自行操作服務。
The system is classified as a Grade B instrument, and operation can be carried out by the individual making the reservation or by qualified personnel.
2.申請委託操作者須事先與儀器管理員連絡並進行實驗討論評估，確認樣品及製程可使用本機台，並由管理員估價計算費用後，經指導教授或主管同意後，方可提出使用申請。
Those applying for commissioned operation should discuss and evaluate the experiment with the instrument administrator in advance, ensuring that the sample and fabrication process are suited for the instrument. The application can be filed after the cost is estimated by the administrator and approved by either the advisor or the supervisor.
3.委託操作使用者採序號預約，確認可提出使用申請者請先至本中心網站下載『FIB實驗申請單』，詳填資訊後，e-mail至cnst-adm@cc.nctu.edu.tw並以電話或E-mail與儀器負責人洽詢使用時段及確認實驗條件與試片製備。委託申請人需在現場共同進行實驗。
Each case of commissioned operation is by reservation only. Applicants who have been evaluated and approved can down the “FIB application form” from our website, and email the completed form to cnst-adm@cc.nctu.edu.tw. The applicants are required to contact the instrument supervisor via phone or email regarding the available time slot, sample preparation and fabrication. The applicants have to be present for the duration of the experiment.
4.申請自行操作者，可於與儀器管理員連絡並進行實驗討論評估，確認樣品及製程可使用本機台，經指導教授或主管同意後，始可申請加入本中心會員並提出自行操作訓練考核申請，其訓練考核程序請參照『自行操作訓練與考核辦法』，通過考核後始可自行操作。
The applicant who is willing to operate the instrument by himself should discuss the details of his experiment, such as sample confirmation and fabrication, with the administrator first. After obtaining permission from the supervisor, the applicant can apply for membership of the center as well as evaluation of operation and training. For details about evaluation procedures, please refer to “ Guideline for independent operation and evaluation.” Those who pass the evaluation can operate the instrument independently.
5.自行操作者採取網路預約。通過機台考核之合格使用者始可取得網路預約之帳號。加入會員及申請訓練者請先至本中心網站下載『FIB實驗申請單』，詳填資訊後，e-mail至cnst-adm@cc.nctu.edu.tw並以電話或E-mail與儀器負責人洽詢訓練考核相關事宜。
The qualified users can make reservations online. After passing the practical evaluation, users can obtain an account number for online reservation purpose. Those who wish to apply for membership and training, please download the “FIB application form” from our website. Email the completed form to cnst-adm@cc.nctu.edu.tw. Users should contact the instrument supervisor via phone or email for details regarding training and evaluation.
6.使用者須遵守實驗室所有相關規定。違反實驗室規定者依本中心實驗室管理規則辦理。
Users must abide by the regulations of the laboratory. Those in violation of lab regulations are subject to punishments accordingly.
7.如有任何疑問，歡迎來電洽詢儀器負責人員。
Please feel free to contact the administrator for any further inquiries.
8.機台使用費用規定請參照『收費標準』。
Please refer to “Fee” for details of fees for using the instrument.

自行操作訓練與考核辦法 Guideline for independent operation and evaluation

1. 本系統自行操作各單位（以指導教授、計畫主持人或公司行號為單位）開放三個名額，每位申請者須同時提出其研究使用計畫及材料特性予本中心，由本中心評估並決定是否可接受其申請。
The applicants who want to operate by themselves need to submit the details of their experiment and sample material for application of membership and the training program. The account of membership is registered under your supervisor, PI, or company name.
2. 申請者上網下載並填寫『FIB實驗申請單』詳填使用者與試片資訊後，e-mail至lcli@faculty.nctu.edu.tw，本中心將儘速回覆您的使用申請。申請核可後，管理員會以E-mail將『見習訓練紀錄表』寄予申請人，在申請人見習時數完成後，可email與管理員洽詢上機訓練時段。
Applicants should download the “FIB application form” online and email the completed form, including details about the user and lamella, to lcli@faculty.nctu.edu.tw. We will respond to your application as soon as possible. Once the application is approved, the administrator will email a log sheet for the probationary training to the applicant. Upon completion of probationary training, the applicant can contact the administrator for the booking of hands-on training.
3. 本機台訓練時數分為見習時數與上機時數，其規定如下：
(a). 見習時數須達到15小時，方可提出上機訓練之申請，若可提出已取得FIB或任何電子顯微鏡相關機台自行操作使用證明者，可減免此見習時數。
(b). 上機訓練時數須達21小時，方可提出機台考核申請。
The whole training program includes probationary training and hands-on training.
(a). The user has to accumulate 15 hours of probationary training before applying for hands-on training. If the user can prove himself to be a qualified operator of FIB or any other similar electron microscope, the probationary training can be waived.
(b). Once the user accumulates 21 hours of hands-on training, he may apply for the hands-on evaluation.
4. 訓練時數達到上述之時數後，可向管理員申請考核。考核通過後，可於週一至週五8:00~17:00自行操作。全程自行操作累積使用時數達30小時以上，並未有任何違反機台規定與任何損及行為者，可申請全開放時段之使用權限。
Those who have accumulated the above-mentioned hours of training can approach the administrator for the evaluation application. Once the users pass the evaluation, they can operate the instrument independently from Monday to Friday between 9:00 AM and 6:00 PM. Those accumulating 30 hours of independent operation without violating any regulation or causing any damage may apply for unrestricted access permission.
5. 合格使用者皆有訓練新訓人員之義務。
All qualified users are obligated to train new personnel.
6. 各實驗室可自行訓練新訓人員。
Training of new personnel can be conducted voluntarily by members of each lab.
7. 考核通過者若連續 6 個月無操作紀錄，取消其自行操作資格。日後若需自行操作，需另行申請、訓練、考核。
Qualified users without any record of operation for 6 months will be disqualified from independent operation. They will be required to repeat the process of application, training, and evaluation again, should they need to operate independently.
8. 本中心將於實驗完畢後依據使用時間斟酌自儲值費用中扣取實驗費用。
The charge for the operation will be deducted from the pre-paid account of your membership upon completion of experiment.

樣品規範 Sample specifications

1. 為使儀器提供給必要研究者使用，避免儀器資源的浪費，建議與機台管理者詳細討論後，再決定是否進入機台觀察，以充分發揮本儀器之功能。
Use of instruments should be prioritized for researchers requiring the instruments. To avoid any possible waste of resources, users must discuss with the administrator before deciding whether observation is necessary. Usage of the machine should be optimized.
2. 操作前必需詳細說明試片之材料種類、製作方式與溶劑種類。為減少儀器不必要的污染，本機台對於檢驗樣品的限制如下：
(a).待測樣品應該具有適當、足夠的機械強度，以避免在進出電鏡、或在檢測的操作過程中，發生剝落、碎裂的狀況。
(b).低熔點的材料如:銦,錫等, 會產生相變及蒸鍍效應，請勿預約本機台。
(c).在電子束照射下會分解或釋出氣體之樣品，若有影響真空造成污染之虞，本單位有權拒絕受理。
(d).具強磁性或易被電磁透鏡吸引的粉末型式樣品或材料，本單位有權拒絕受理。
(e).未經正確處理或充分乾燥的粉末樣品，本單位有權拒絕受理。
The material, fabrication, and solvent should be specified before operation. The following restrictions will be apply to samples in order to minimize contamination.
(a). Samples should possess sufficient mechanical strength to avoid the possibility of peeling off or cracking in the process.
(b). Material with low melting point may result in phase change or evaporation effect.
(c). Samples with the possibility of gas decomposition or emission after electron beam exposure may lead to vacuum chamber contamination.
(d). Ferromagnetic powdery sample or material may be attracted to electromagnetic lenses.
(e). Powdery samples are not properly dried.
Please inform and discuss with the administrator before you start the experiment.
3. 樣品的尺寸：要製作TEM Lamella樣品者，請將試片切到直徑1cm以內，其他用途試片較理想容易操作大小為直徑2.5 cm內，直徑超過2.5 cm或表面局部起伏超過2 um皆視為特殊尺寸樣品，應事先與管理者聯繫確認是否適合進行實驗。
For making TEM lamella, please keep the sample size within 1cm of diameter. Others, Ideal sample size is within 2.5cm X 2.5cm, or within 2.5cm in diameter. For samples greater than 2.5cm in diameter or with over 2um of roughness, users should bring the sample size to the administrator’s attention before proceeding with the experiment.
4. 半導體、導電性不佳及絕緣體試片需先鍍導電膜(金或鉑較佳)，現場我們亦可提供鍍膜處理。
It is suggest that samples with low conductivity should be coated by Pt or Pd film beforehand. If not, we also can help to coat Pt film by sputter.
5. 存取資料請自備空白光碟片。為避免設備中毒，禁用隨身碟進行圖檔傳輸。
Users are advised to prepare CDs for data storage. The use of flash drive is forbidden to prevent any possibility of virus infection.
6. 每3小時一個時段可提供一片TEM試片製作所需之銅網。
For TEM lamella, a piece of TEM copper grid is provided by the lab for one operation unit.
7. 自行操作人員，若擅自放入上述有害的試樣於本儀器者，將被吊銷操作資格。
If the qualified user is found loading any harmful sample with above-mentioned description, the user will be disqualified from operating the instrument.
8. 委託操作者上機前，技術員會再次要求確認您的樣品種類，請誠實申報。若發現申報不實，本中心將取消您的使用資格。
In cases of commissioned operation, the administrator will verify the description of the sample with you. If sample description is found to be false, you will be disqualified from using the instrument.
9. 若因違反規定造成儀器污染或損壞時，所隸屬單位及其指導教授須負責賠償，賠償費用由原廠評估，再由本中心開會決議後執行並暫停儀器之使用權。
If violation of regulation results in contamination or damage of the instrument, the institute and the advisor will bear the cost of compensation, which will be estimated by the manufacturer. We may disqualify the user from using the instrumen