紫外臭氧清洗機 PSD Pro Series digital UV Ozone Cleaner

聯絡方式 Contact

儀器管理者 Instrument administrator

王圣瑩小姐Miss Sheng Ying Wang TEL: 03-5712121 ext 55640

EMAIL: sy1028@nycu.edu.tw

對外開放服務時間 Opening hours

週一~週日 00:00~24:00 。
0:00~24:00 from Monday to Sunday.

儀器放置位置 (Position) : R115

使用功能說明 Applications

1. 表面的原子級清洗Silicon AFM Probe Cleaning / Tip Sharpening

2. 表面化學改性Improvement of Surface Wettability

3. 表面氧化Semiconductor Surface Oxidation and Preparation

4. 紫外光固化Ultraviolet Curing

5. 微米/奈米構型Surface Patterning

6. 金屬粘結準備 Preparation for Thin Film Deposition

7. 去除有機分子Cleaning Quartz and Ceramic Surfaces

規格 Specifications

UV lamp generates UV light at both 185nm and 254nm. Novascan UV Ozone Cleaners have proven to be highly effective for non-acidic, dry, non-destructive atomic cleaning and removal of organic contaminants using intense 185 nm and 254 nm ultraviolet light. In the presence of oxygen, the 185 line produces Ozone and while the 254 line excites organic molecules on the surface. This combination drives the rapid destruction and decimation of organic contaminants. Sample Stage is equipped with adjustable sample to lamp distance which can be used to improve the performance.
Power 100.120.220.240V AC
UV lamp life 5000 hr
UV lamp size 4×4″
Sample stage height 4″
Machine size 15″L×15″W×10.5″H

收費標準 Fee

學術會員 Academic member
自行操作 Independent Operation 150 (元/小時) NTD$ 150/Hour
操作訓練 (實際時數於當期會費扣除) Training (Deduction from Membership) 300 (元/小時) NTD$ 300/Hour
不開放委託操作 Commision-operation is not available.

本機台不開放業界使用 It is not available for industry user.

管理及服務辦法 User regulations

1. 本機台僅提供自行操作服務。
The system is only carried out by qualified personnel.
2. 申請自行操作者，可於與儀器管理員連絡並進行實驗討論評估，確認樣品及製程可使用本機台，經指導教授或主管同意後，始可申請加入本中心會員並提出自行操作訓練考核申請，其訓練考核程序請參照『六、自行操作訓練與考核辦法』，通過考核後始可自行操作。
The applicant who is willing to operate the instrument by himself should discuss the details of his experiment, such as sample confirmation and fabrication, with the administrator first. After obtaining permission from the supervisor, the applicant can apply for membership of the center as well as evaluation of operation and training. For details about evaluation procedures, please refer to “VI. Guideline for independent operation and evaluation.” Those who pass the evaluation can operate the instrument independently.
3. 自行操作者採取網路預約。通過機台考核之合格使用者始可取得網路預約之帳號。加入會員及申請訓練者請先至本中心網站下載『設備使用申請表_紫外臭氧清洗機』，詳填資訊後，e-mail至ch333@nycu.edu.tw並以電話或E-mail與儀器負責人洽詢訓練考核相關事宜。
The qualified users can make reservations online. After passing the practical evaluation, users can obtain an account number for online reservation purpose. Those who wish to apply for membership and training, please download the “UV Ozone Cleaner application form” from our website. Email the completed form to ch333@nycu.edu.tw. Users should contact the instrument supervisor via phone or email for details regarding training and evaluation.
4. 使用者須遵守實驗室所有相關規定。違反實驗室規定者依本中心實驗室管理規則辦理。
Users must abide by the regulations of the laboratory. Those in violation of lab regulations are subject to punishments accordingly.
5.。如有任何疑問，歡迎來電洽詢儀器負責人員。
Please feel free to contact the administrator for any further inquiries.
6. 機台使用費用規定請參照『收費標準』。
Please refer to “Fee” for details of fees for using the instrument.

自行操作訓練與考核辦法 Guideline for independent operation and evaluation

1每位指導教授開放一位學生受訓名額。
The training quota is one student for one adviser.
2 會員完成繳費程序後自行與儀器聯絡人接洽訓練事宜。
The member who finish payment should contact instrument administrator for training details.
3 一般申請人需自行下載『設備使用申請表_紫外臭氧清洗機』，完成申請程序後自行與儀器聯絡人接洽訓練事宜。
If you want to apply for training, please download『CNST Experiment application form』of UV Ozone Cleaner and finish all application process, then contact instrument administrator for training details.
4 累積訓練時數達 3 次以上者方可向儀器聯絡人申請考核。
Those who have accumulated more than 3 times of training may apply to the instrument administrator for assessment.
5 考核通過者，可於上班時段自行操作。
If you pass the qualification, you can operate the instrument during work hours.
6 考核通過者若連續 6 個月無自行操作紀錄，請先洽詢儀器聯絡人再視情況開放自行操作。
If the user has no record of Independent-operation for 6 consecutive months, please contact instrument administrator first and check if it is possible to open access for Independent-operation.

樣品規範 Sample specifications

可接受的樣品Suitable Substrate Materials
• Silicon
• Gallium Aresenide
• Glass
• Quartz
• Mica
• Sapphire
• Metals
• Ceramics
• Polymers
• Resists

Open Seminar for Nano-Opto-Electro-Mechanical Systems (NOEMS)

Date: 2025.01.13

Place: HSS Building 3 Room 103 (人社三館HC103)

Agenda:

10:30-11:00

Nano-Opto-Electro-Mechanical Integrated Oscillator Arrays for Energy-Efficient Physical Reservoir Computing (NOEMIA)

Dr. Yoshishige Tsuchiya

School of Electronics and Computer Science, University of Southampton, UK

11:00-11:30

Nanomechanical metamaterials and multifunctional metalenses

Dr. Jun-Yu Ou

School of Physics and Astronomy, University of Southampton, UK

11:30-12:00

Laser Processing of GeSn Epitaxial Layers: Insights into Surface Dynamics and Optoelectronic Applications

Dr. Pavels Onufrijevs

Institute of Technical Physics, Riga Technical University, Latvia

The lunch box will be provided. Welcome to discuss with speakers after the seminar.

Please register before 2025.1.7

Sign-up Link:

https://forms.gle/cn1zwZ6UjPsGCa9f9

Call for collaboration:

Dr Yoshishige Tsuchiya has strong technical expertise in silicon nanodevice design and fabrication, quantum devices, NEM devices, NOEMS, and nanoscale imaging.

Dr Jun-Yu Ou has research expertise in metamaterials, nano-optomechanics, metalens and AI for imaging and nanometrology.

They are currently leading the Chist-Era NOEMIA project (2023-2026) to develop novel Nano-Opto-Electro-Mechanical Systems (NOEMS) for energy-efficient machine learning hardware in collaboration with IEMN in France, NTU in Taiwan, RTU in Latvia, and ITCAS in Czech. Recently they started leading a new UK-Japan collaboration project HetMEPS (2024-2028) to develop a novel heterogeneous integration platform of materials, MEMS/NEMS, and photonics for hardware secure communication in collaboration with the Institute of Science Tokyo and AIST, Japan.

They are calling for collaborators for the UK-Taiwan and EU-Taiwan collaboration in photonics, quantum devices, and next-generation semiconductor devices.