熱蒸鍍機 Thermal Evaporator

聯絡方式 Contact

儀器管理者 Instrument administrator

陳偉杰同學 TEL: 03-5712121 ext 56588 phone:0988046512

EMAIL: weijay.sc11@nycu.edu.tw

對外開放服務時間 Opening hours

週一~週日 00:00~晚上24:00

00:00~24:00 from Monday to Sunday.

使用功能說明 Applications

1. 金屬蒸鍍(Metal evaporation)：(Au, Ni, Al, Ge, Ti, Ag)

規格 Specifications

規格 (Specifications)：
1. 蒸鍍種類及樣品大小(Evaporation type and sample size)：

(1) Allowable Evaporation Source：Au, Ni, Al, Ge, Ti, Ag,

(2) For 1 sheet of 4 inch wafer or smaller than 4 inch

(3) 6 electrodes for evaporation source

2.抽氣效率(Pumping Performance)：

(1) Ultimate Pressure: 8.0 x 10-7 Torr(After 24Hrs Pumping)

(2) Pumping rate: 40min to 7 x 10-6 Torr

3.鍍膜均勻性(Deposition Performance)：

(1) Film thickness uniformity on the substrate: < 5%

(2) Film thickness uniformity within the batch: < 5%

收費標準 Fee

1.委託操作費用(Commissioning fee )

學術單位(Academic institute) 2500元/hr

業界( Corporation) 5000元/hr

Au 時價(1.5公克/KA)

Ti 660元/KA

Ni 440元/KA

Ge 660元/KA

Al 440元/KA

Ag 440元/KA

鎢舟 110元/次

2.自行操作會員收費(independent-operation fee)

學術單位(Academic institute) 22400/20 hr

業界( Corporation) 44800/20 hr

3.自行操作訓練 (Training fee)

若由各單位合格操作者自行訓練，其訓練使用時數由各單位之會員時數扣除費用

若委託本中心代為訓練，費用為：

If training is conducted by a qualified operator, the charge for the training period will be deducted from the membership account of the institute. If the training is conducted by the administrator, the charge is as follows:

學術單位(Academic institute 2000/hr)

業界( Corporation 4000/hr)

管理及服務辦法 User regulations

1.本機台為B級機台，提供委託及自行操作服務。

The system is classified as a Grade B instrument, and operation can be carried out by the individual making the reservation or by qualified personnel.

2.申請委託操作者須事先與儀器管理員連絡並進行實驗討論評估，確認樣品及製程可使用本機台，並由管理員估價計算費用後，經指導教授或主管同意後，方可提出使用申請。

Those applying for commissioned operation should discuss and evaluate the experiment with the instrument administrator in advance, ensuring that the sample and fabrication process are suited for the instrument. The application can be filed after the cost is estimated by the administrator and approved by either the advisor or the supervisor.

3.委託操作使用者採序號預約，確認可提出使用申請者請先至本中心網站下載『實驗申請單』，詳填資訊後，e-mail至cnst-adm@cc.nctu.edu.tw並以電話或E-mail與儀器負責人洽詢使用時段及確認實驗條件與試片製備。委託申請人需在現場共同進行實驗。

Each case of commissioned operation is by reservation only. Applicants who have been evaluated and approved can down the “ application form” from our website, and email the completed form to cnst-adm@cc.nctu.edu.tw. The applicants are required to contact the instrument supervisor via phone or email regarding the available time slot, sample preparation and fabrication. The applicants have to be present for the duration of the experiment.

4.使用者須遵守實驗室所有相關規定。違反實驗室規定者依本中心實驗室管理規則辦理。

Users must abide by the regulations of the laboratory. Those in violation of lab regulations are subject to punishments accordingly.

5.如有任何疑問，歡迎來電洽詢儀器負責人員。

Please feel free to contact the administrator for any further inquiries.

6.機台使用費用規定請參照『收費標準』。

Please refer to “ Fee-Charging Standard” for details of fees for using the instrument.

自行操作訓練與考核辦法 Guideline for independent operation and evaluation

1.申請自行操作者，可於與儀器管理員連絡並進行實驗討論評估，確認樣品及製程可使用本機台，經指導教授或主管同意後，始可申請加入本中心會員並提出自行操作訓練考核申請，其訓練考核程序請參照『六、自行操作訓練與考核辦法』，通過考核後始可自行操作。

The applicant who is willing to operate the instrument by himself should discuss the details of his experiment, such as sample confirmation and fabrication, with the administrator first. After obtaining permission from the supervisor, the applicant can apply for membership of the center as well as evaluation of operation and training. For details about evaluation procedures, please refer to “VI. Guideline for independent operation and evaluation.” Those who pass the evaluation can operate the instrument independently.

2.自行操作者採取網路預約。通過機台考核之合格使用者始可取得網路預約之帳號。加入會員及申請訓練者請先至本中心網站下載『實驗申請單』，詳填資訊後，e-mail至cnst-adm@cc.nctu.edu.tw並以電話或E-mail與儀器負責人洽詢訓練考核相關事宜。

The qualified users can make reservations online. After passing the practical evaluation, users can obtain an account number for online reservation purpose. Those who wish to apply for membership and training, please download the “ application form” from our website. Email the completed form to cnst-adm@cc.nctu.edu.tw. Users should contact the instrument supervisor via phone or email for details regarding training and evaluation.

樣品規範 Sample specifications

1.使儀器提供給必要研究者使用，避免儀器資源的浪費，建議與機台管理者詳細討論後，再決定是否進入機台觀察，以充分發揮本儀器之功能。

Use of instruments should be prioritized for researchers requiring the instruments. To avoid any possible waste of resources, users must discuss with the administrator before deciding whether observation is necessary. Usage of the machine should be optimized.

2.存取資料請自備空白光碟片。為避免設備中毒，禁用隨身碟進行資料傳輸。

Users are advised to prepare CDs for data storage. The use of flash drive is forbidden to prevent any possibility of virus infection.

3.自行操作人員，若擅自放入上述有害的試樣於本儀器者，將被吊銷操作資格。

If the qualified user is found loading any harmful sample with above-mentioned description, the user will be disqualified from operating the instrument.

4.委託操作者上機前，技術員會再次要求確認您的樣品種類，請誠實申報。若發現申報不實，本中心將取消您的使用資格。

In cases of commissioned operation, the administrator will verify the description of the sample with you. If sample description is found to be false, you will be disqualified from using the instrument.

5.若因違反規定造成儀器污染或損壞時，所隸屬單位及其指導教授須負責賠償，賠償費用由原廠評估，再由本中心開會決議後執行並暫停儀器之使用權。