單電子槍蒸鍍機 E-gun Evaporator

聯絡方式 Contact

儀器管理者 Instrument administrator

林玉龍先生Yu Lon Lin TEL: 03-5712121 ext 55335 / 0908188667

EMAIL: yulon0908@gmail.com

對外開放服務時間 Opening hours

全天全時段開放每日四個時段，每時段四小時。
00:00~24:00 from Monday to Sunday; Four time slots (four hours each) are available per day. (8:00~12:00/13:00~17:00/18:00~22:00/0:00~4:00)

附註：若內部維護或技術發展與訓練則不接受預約。

儀器放置位置 (Position) : R223

使用功能說明 Applications

1. 金屬沉積 (metal deposition)

上一張

下一張

規格 Specifications

1.廠牌及型號 (System model)： ULVAC， EBX-8C

2.元件電極金屬蒸鍍 (metal evaporation)：(Au, Ni, Al, Ge, Ti, Pt, Pd)

3.儀器性能說明 (Description of Utility and Function)：

3-1.靶材與晶圓乘載量(source and wafer load capacity)：

(1) Allowable Evaporation Source：Au, Ni, Al, Ge, Ti, Pt, Pd

(2) For 8 sheets of 4 inch wafers or smaller than 4 inch

(3) 4 hearths (2.9cc x 4) for evaporation source (crucible of 2cc)

3-2.真空度(Pumping Performance)：

(1) Ultimate Pressure: < 5.0 x 10-7 Torr

(2) Pump down time: 3.0 x 10-7 Torr

3-3.鍍膜均勻性(Deposition Performance)：

(1) Film thickness uniformity on the substrate: < 5%

(2) Film thickness uniformity within the batch: < 5%

收費標準 Fee

1.委託操作費用 (Commissioning fee )
學術單位 (Academic institute) NT$2750 / time
業界 ( Corporation) NT$4000/ time
金屬沉積 (Metal deposition) 依厚度計算

Au、Pt current price (1.5公克(g)/KA)；Ti: 600 TWD /KA、Ni: 400 TWD /KA、Ge: 600 TWD /KA、Al: 400 TWD /KA、Pd: 1000 TWD/KA
2. 自行操作會員收費 (independent-operation fee)
學術單位 (Academic institute) NT$12500 / 10 times；NT$25000 / 20 times
3. 自行操作訓練 (Training fee)
若由各單位合格操作者自行訓練，其訓練使用時數由各單位之會員時數扣除費用
若委託本中心代為訓練，費用為NT$1250 / time，不開放業界自行操作及訓練：
If training is conducted by a qualified operator, the charge for the training period will be deducted from the membership account of the institute. If the training is conducted by the administrator, the charge is NT$1100 / time. No Corporation independent-operation and training.

管理及服務辦法 User regulations

1.本機台提供委託及自行操作服務。
Operation can be carried out by the individual making the reservation or by qualified personnel.

2. 申請委託操作者須事先與儀器管理員連絡並進行實驗討論評估，確認樣品及製程可使用本機台，並由管理員估價計算費用後，經指導教授或主管同意後，方可提出使用申請。
Those applying for commissioned operation should discuss and evaluate the experiment with the instrument administrator in advance, ensuring that the sample and fabrication process are suited for the instrument. The application can be filed after the cost is estimated by the administrator and approved by either the advisor or the supervisor.

3. 委託操作使用者採序號預約。使用申請者請先至本中心網站下載『E-gun Evaporator實驗申請單』詳填資訊後，以電話或E-mail與儀器負責人洽詢使用時段及確認實驗條件與試片製備。
The entrusted operation user selects the serial number to make an appointment. Applicants should first download the “E-gun Evaporator Experiment Application Form” from the center’s website and fill in the details, then contact the person in charge of the instrument by phone or E-mail to inquire about the usage period and confirm the experimental conditions and test piece preparation.

4. 申請自行操作者，經指導教授或主管同意後，始可申請加入本中心會員並提出自行操作訓練考核申請，經合格使用者或儀器管理員訓練，通過考核後始可自行操作。
Those who apply for self-operation can apply for membership of the center and apply for self-operation training assessment only after the approval of the instructor or supervisor. After being trained by qualified users or instrument administrators, they can operate by themselves.

5.自行操作者採取網路預約。通過機台考核之合格使用者始可取得網路預約之帳號。加入會員及申請訓練者請先至本中心網站下載『E-gun Evaporator實驗申請單』，詳填資訊後，並以電話或E-mail與儀器負責人洽詢訓練考核相關事宜。
The qualified users can make reservations online. After passing the practical evaluation, users can obtain an account number for online reservation purpose. Those who wish to apply for membership and training, please download the “E-gun Evaporator application form” from our website. Users should contact the instrument supervisor via phone or email for details regarding training and evaluation.

6. 使用者須遵守實驗室所有相關規定。違反實驗室規定者依本中心實驗室管理規則辦理。
Users must abide by the regulations of the laboratory. Those in violation of lab regulations are subject to punishments accordingly.

7.。如有任何疑問，歡迎來電洽詢儀器負責人員。
Please feel free to contact the administrator for any further inquiries.

8. 機台使用費用規定請參照『收費標準』。
Please refer to “Fee” for details of fees for using the instrument.

9.使儀器提供給必要研究者使用，避免儀器資源的浪費，建議與機台管理者詳細討論後，再決定是否進入機台觀察，以充分發揮本儀器之功能。
Use of instruments should be prioritized for researchers requiring the instruments. To avoid any possible waste of resources, users must discuss with the administrator before deciding whether observation is necessary. Usage of the machine should be optimized.

10.若因違反規定造成儀器污染或損壞時，所隸屬單位及其指導教授須負責賠償，賠償費用由原廠評估，再由本中心開會決議後執行並暫停儀器之使用權。
If violation of regulation results in contamination or damage of the instrument, the institute and the advisor will bear the cost of compensation, which will be estimated by the manufacturer. We may disqualify the user from using the instrument.

自行操作訓練與考核辦法 Guideline for independent operation and evaluation

(a)本系統自行操作各單位（以指導教授、計畫主持人或公司行號為單位）開放三個名額，每位申請者須同時提出其研究使用計畫及材料特性予本中心，由本中心評估並決定是否可接受其申請。

The applicants who want to operate by themselves need to submit the details of their experiment and sample material for application of membership and the training program. The account of membership is registered under your supervisor, PI, or company name.

(b) 訓練並熟悉操作後，可向管理員申請考核。考核通過後，可於週一至週五8:00~17:00自行操作。全程自行操作累積使用次數達5次以上，並未有任何違反機台規定與任何損及行為者，可申請全開放時段之使用權限。

After training and familiarity with the operation, you can apply to the administrator for assessment. After passing the assessment, you can operate by yourself from Monday to Friday from 8:00 to 17:00. Whoever has accumulated more than 5 times of self-operated operation throughout the whole process, without any violation of the regulations of the machine or any damage, can apply for the use permission of the whole open period.

(c)合格使用者皆有訓練新訓人員之義務。

All qualified users are obligated to train new personnel.

(d) 各實驗室可自行訓練新訓人員。

Training of new personnel can be conducted voluntarily by members of each lab.

(e) 考核通過者若連續 6 個月無操作紀錄，取消其自行操作資格。日後若需自行操作，需另行申請、訓練、考核。

Qualified users without any record of operation for 6 months will be disqualified from independent operation. They will be required to repeat the process of application, training, and evaluation again, should they need to operate independently.

(f) 本中心將於實驗完畢後依據使用時間斟酌自儲值費用中扣取實驗費用。

The charge for the operation will be deducted from the pre-paid account of your membership upon completion of experiment.