光罩對準曝光機 DUV Mask Aligner

聯絡方式 Contact

儀器管理者 Instrument administrator

王圣瑩小姐Miss Sheng Ying Wang TEL: 03-5712121 ext 55640

EMAIL: sy1028@nycu.edu.tw

對外開放服務時間 Opening hours

週一~週日 00:00~晚上24:00

00:00~24:00 from Monday to Sunday.

使用功能說明 Applications

1. 次微米線寬曝光製作Independent-operation: exposure for sub-um pattern

規格 Specifications

Vacuum Chuck Motions	X,Y,Z and Theta
Z Motion Travel	0.250 inches
Proximity Adjust	Adjustable in 2.5 um increments
Mask Sizes	Interchangeable up to 9”X9”
Mask Frame Assembly	Lift: Pneumatic up/down
Alignment accuracy	Better than 0.5 um
Pneumatic Controls	Substrate, Mask, Contact, Cont Adj, Chuck Lock, N2, N2 Adj
Lamp	USHIO 500W DUV

收費標準 Fee

項目Item	服務 Service	一般學術計畫Academia	產業界Industry
自行操作 Independent-operation	DUV	300 (元/小時) NTD$ 300/Hour	不開放 Not availible
自行操作 Independent-operation	DUV-WB	300 (元/小時) NTD$ 300/Hour	不開放 Not availible
操作訓練(實際時數於當期會費扣除) Training(Deduction from Membership)	DUV	600 (元/小時) NTD$ 600/Hour	不開放 Not availible
操作訓練(實際時數於當期會費扣除) Training(Deduction from Membership)	DUV-WB	600 (元/小時) NTD$ 600/Hour	不開放 Not availible
自行操作 Only for alpha-step and RTA	alpha-step RTA	300(元/小時) NTD$ 300/Hour	不開放 Not availibler
操作訓練 Only for alpha-step and RTA	alpha-step RTA	600 (元/小時) NTD$ 600/Hour	不開放 Not availibler

管理及服務辦法 User regulations

服務申請流程Service application process：
1. 會員制度
Membership policy
1-1 本設備適用奈米科技中心之會員制度
This equipment is applicable to the membership policy of CNST
1-2 會員制度適用於台灣聯合大學系統專任教師
The membership policy is applicable to full-time teachers of University System of Taiwan
1-3 欲申請會員資格者請自行下載『設備使用申請表_光罩對準曝光機』並完成繳費』
If you want to apply for membership, please download 『CNST Experiment application form』of DUV mask aligner and finish payment.2.DUV自行操作訓練之申請方法
DUVmask aligner application method for Independent-operated training
2-1 申請人必須修過半導體製程相關課程。
Applicants must have taken courses related to semiconductor process.
2-2 一般申請人需自行下載『設備使用申請表_光罩對準曝光機』，完成申請程序後自行與儀器聯絡人接洽訓練事宜。
f you want to apply for training, please download『CNST Experiment application form』of DUV mask aligner and finish all application process, then contact instrument administrator for training details.
2-3 累積訓練時數達 6 小時以上者方可向儀器聯絡人申請考核。
Those who have accumulated more than 6 hours of training may apply to the instrument administrator for assessment
2-4 考核通過者，可於上班時段自行操作。請累積一定自行操作時數後再向管理員申請夜間及非上班時間自行操作資格(請洽管理員)。
If you pass the qualification, you can operate the instrument during work hours. Please accumulate a certain number of self-operating hours and apply to the administrator for self-operating at night and non-working hours (please contact the administrator).
2-5 考核通過者若連續 6 個月無自行操作紀錄，請先洽詢儀器聯絡人再視情況開放自行操作。
If the user has no record of Independent-operation for 6 consecutive months, please contact instrument administrator first and check if it is possible to open access for Independent-operation.
2-6 考核通過者若連續 6 個月無自行操作紀錄，請先洽詢儀器聯絡人再視情況開放自行操作。
If the user has no record of Independent-operation for 6 consecutive months, please contact instrument administrator first and check if it is possible to open access for Independent-operation.3. 可以單獨使用Wet bench，需在預約儀器網頁的DUV-Wet bench頁預約。
Wet bench can be used by itself. Reservations must be made on the DUV-Wet bench page of the appointment instrument web page.4. 預約自行操作之方法
Appointment for Independent-operation
4-1會員直接上網預約。
Members should make online reservations.
4-2 此項儀器開放通過考核者於上班時段自行操作，凡使用者應自行詳細確實的填寫儀器使用紀錄簿，並註明所發生的任何異常狀況，違者停止使用資格 6 個月。
This instrument is open to Independent-operation after qualification during work hours. All users should fill out the instrument usage record in a detailed manner, and indicate any abnormal conditions. The offender shall cease to use instrument for 6 months.
4-3 自行操作(預約)滿5次以上，且滿10小時以上，一日計一次，可申請DUV夜間及非上班時間自行操作資格。若僅使用DUV wet bench的使用者，則需累積滿10次以上，且滿20小時以上，一日計一次。
The self-operation is accumulated more than 5 times and 10 hours, you can apply for self-operating at night and non-working hours of DUV instrument; for the users only have the license of wet bench, the self-operating times and hours shall be double of DUV.
4-4 若因個人操作不當造成儀器損壞，本中心可視情況要求操作者所屬實驗室主管做合理的賠償，唯匿情不報者除要求賠償外，並撤銷其單位往後的使用資格。
If the instrument is damaged due to improper personal operation, CNST may require the operator’s adviser to make reasonable compensation. If you damage the instrument and do not report this, they not only shall make compensation but also be ceased to use in the future.5. 本儀器不接受委託服務
Commission operation is not available.

設施服務須知Facilities Service Information：
1. 本設備經考核可開放自行操作。本系統服務以 2 小時為 1 單元，每人每次最多預約 2 單元。
This equipment can be opened to Independent-operation after being qualified. The system service is based on 2 hours for 1 unit and each person can book up to 2 units at a time.2. 預約後欲取消須於 48 小時之前告知，違者停止預約資格一個月。
To cancel the reservation should be informed 48 hours before, and offenders eligible to stop the appointment a month.3. 一年內累積爽約 3 次，停止預約資格六個月
When accumulated about 3 times in one year, stop booking qualification for 6 months

自行操作訓練與考核辦法 Guideline for independent operation and evaluation

樣品規範 Sample specifications

Thickness profile meter	Scan Length range : 30 um；Sample Thickness : 20 um； Vertical resolution : 100 nm；Vertical range ~1200 um
Rapid Thermal Anneal system	Sample size: 2×2 cm2；Maximum Temperature: 900 C