113/1/6(六)停電進行饋線年度維修,請各設備於1/5(
In Jan. 6, 2024, this building will be in electricity maintenance. All of facilities will be shutdown before 16:00 in Jan, 5, 2024. The fab operation system will be stopped at 16:00 in Jan. 5, 2024 and resumed at 10:00 in Jan. 8, 2024. The access control of the building will be from 16:00, 2024/1/5 to 10:00, 2024/1/8. Please check with administrators for the resumed time table of each equipment.
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由於FIB Ga source 有問題導致 I-GUN高壓漏電, 需重新更換Ga Source, FIB 暫時停用!
Due to the problem of FIB Ga Source, there is the current leakage of the suppressor unit of FIB I-Gun. FIB is not available before the Ga source is replaced.